A good tutorial to Rutherford Backscattering Spectroscopy (RBS) is available from Charles Evans and Associates.
To analyze RBS data, a direct extraction program was implemented in nawk to convert the spectra into Ge-content-versus-depth using well-established formulas for electronic scattering of alpha particles and the scattering cross-section associated with nuclear scattering of alpha particles off Si and Ge atoms.
A full report of the method is available here.
Data can also be extracted indirectly -- by simulating the spectra associated with the Ge content as a function of depth and adjusting the parameters associated with the simulated structure to optimize the fit between the simulated and measured spectra. This method has the advantage over the indirect analysis of easily accounting for the energy dispersion associated with the measurement.
A report of the method is available here.