Many types of devices were fabricated as part of the processes used in this work. However, those of principle interest are the diodes, the capacitors, and the field-effect transistors. These are described in detail in the following sections:

• Diodes: Diodes test the quality of the metal-semiconductor contacts, the incorporation of dopant into the semiconductor, and the quality of the semiconductor material near the surface. They are also sensitive to the field isolation.
• Capacitors: Capacitors test the quality of the gate insulator and the success of the field isolation scheme.
• Field-Effect Transistors: Take a few diodes, connect them with a capacitor, and you have a FET. Well, it's not quite that simple...